5.2 Process Flow Interface5.2 Process Flow Interface. . Therefore the detailed flow descriptions are not implemented in the MES system until the process flow is frozen. Normally the flow description is tabulated . Figure 5.1: Screen-shot of EXCEL-Sheet description for research&development short-loops or semiconductor processes in development.Chartered Semiconductor Manufacturing - ProjectsMay 24, 2007 . Process. Control. (SPC). WIP Mgt. (include. NPW). Carrier Mgt. (FOUP). User Mgt. Equipment. Mgt. Flow Mgt. Fault. Detection &. Classification. (FDC) &. eDiagnostics. Defect Mgt. System. (KLArity). Wafer Sleuth. System. Yield Mgt. System. (KLA-ACE). Run-to-Run. Control. (). System. Business Rules.
R20081213 . 3. Fabricated Wafers. Semiconductor Data Flow. WAT. FT. WS/CP. WIP (MES, iEMS). Wafer. start. Fab out. Continually Defect inspection and review: inspection . (MES). MET. Defect. (KLARF). WIP. EQ log. data. Test data. Process data. Also reliability, memory bit, QC and other data. Statisticians at SMIC.Wafer Fab Flowchart - CMOS Process - Linear TechnologyREV 0 WAFER FABRICATION FLOWCHART – CMOS PROCESS. LINEAR TECHNOLOGY CORPORATION. PAGE 1 OF 5. WAFER FABRICATION FLOWCHART. Vendor: Linear Technology Corporation. Product: CMOS Products. Package: All Package Types. Location of Wafer Fab: Linear Technology Corp., Milpitas, CA.
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